Ultra High Purity Gas Diaphragm Valves (VDV32UB)

  • Suitable for ultra pure, flammable or toxic fluid lines in semiconductor manufacturing equipment and facilities
  • Direct diaphragm construction with superior sealing prerformance,remarkable durability,compactness and particle and dead-space-free performance
  • Valve open and closed opsition is easily visible at a glance
  • Excellent gas displacement characteristics
  • EP treatment is standard for all wetted sufaces
  • Standard seat material is PCTFE.Ployimede/PFA is option

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  • Max. Working Pressure: 150 psig (10 bar)
  • Pneumatic Operating Pressure: 58~87psig (4-6bar)
  • Max. Working Temp.: -10oF ~ 150oF (-23oC ~ 65oC)
  • Surface finish: 10μin. Ra

For more detailed information, click the button below to download PDF.

  • Body: see ordering info
  • Diaphragm: Elgiloy®
  • Seat packing: PCTFE
  • Handle: AL
  • Internal Leakage Allowance: 1×10-9 mbar I/s He
  • External Leakage Allowance: 1×10-9 mbar I/s He
  • Orifice: Ф4.4mm
  • Weight: approx. 0.27kg (actuator not included)

For more detailed information, click the button below to download PDF.

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