Ultra High Purity Gas regulators (VSR-210UB)
- Single-stage pressure regulator
- 10μin. Ra surface finish (25μin. Ra optional)
- Minimized internal volume for short purge times
- All gas-wetted parts made of stainless steel SS 316L,Hastelloy C276 and PCTFE respectively
- Internal connectors for pressure gauges
- Force conpensation has wider flow cupacity
- High control accuracy
- Metal-to-metal seal to atmosphere
- Simple outlet pressure limitation by hand-wheel
- 100% helium-leak-tested
- Tied-diaphragm design
For more detailed information, click the button below to download PDF.
- Type: single-stage
- Inlet pressure P1: max. 3000 psig
- Outlet pressure P2: 30/60/100/150 psig
- Surface finish: 10μin. Ra (25μin. Ra optional)Materials
- Body: see ordering info
- Valve seat: PCTFE (Vespel® optional)
- Diaphragm: Hastelloy® C276
- Inlets and Outlets: 1/4” / 3/8” or 1/2” ace seal or tube weld
- Bonnet port: 1/8” NPT(F) (on panel mount option, bonnet port is not threaded)
- Temperature range: -40oF to +160oF (-40oC to +71oC)
- Leak rate:(to atmosphere)1×10-9 mbar I/s He
(via seat)1×10-8 mbar I/s He - Flow capacity: Cv=0.65, Cv=1.1 (HF optional)
- Weight: approx. 2.0kg
- Supply pressure effect: 3.5 psig rise in delivery pressure per
100 psig source pressure drop
4.2 psig rise in delivery pressure per
100 psig source pressure drop (FC option)
For more detailed information, click the button below to download PDF.