Ultra High Purity Gas regulators (VSR-610UC)
- Single-stage pressure regulator
- 15μin. Ra max, 10μin. Ra average surface finish (10μin. Ra max, 7μin. Ra max, 5μin. Ra max optional)
- Minimized internal volume for short purge times
- All gas-wetted parts made of stainless steel SS 316L, Hastelloy C276 and PCTFE respectively
- Internal connectors for pressure gauges
- Flow capacity: to 100 slpm
- High control accuracy
- Metal-to-metal seal to atmosphere
- Simple outlet pressure limitation by hand-wheel
- 100% helium-leak-tested
- Cleaned for O2 service
For more detailed information, click the button below to download PDF.
- Type: single-stage
- Inlet pressure P1: max. 3500 psig
- Outlet pressure P2: 10/30/60/100 psig
- Surface finish: 15μin. Ra max / 10μin. Ra avg (10μin. Ra max., 7μin. Ra max., 5μin. Ra max optional)
For more detailed information, click the button below to download PDF.
- Body: see ordering info
- Valve seat: PCTFE (Vespel® optional)
- Diaphragm: Hastelloy® C276
- Inlets and Outlets: 1/4” / 3/8” or 1/2” face seal or tube weld
- Bonnet port: 1/8” NPT(on panel mount option, bonnet port is not threaded)
- Temperature range: -40oF to +160oF (-40oC to +71oC)
- Leak rate:(to atmosphere) 1×10-9 mbar I/s He(via seat) 1×10-8 mbar I/s He
- Flow capacity: Cv=0.13
- Weight: approx. 1.54kg (depending on connections or options)
- Supply pressure effect: 0.25 psig rise in delivery pressure per 100 psig source pressure drop
For more detailed information, click the button below to download PDF.