Ultra High Purity Gas Gauges (VRU)

  • UHP “clean” for semiconductor gas applications, in accordance with SEMI/SEMATECH
  • Packaged in two bags
  • Purged with nitrogen
  • Protective cap over threaded connection
  • 100 % factory calibrated and helium leak tested to a maximum rate of 1 × 10-9 mbar I/s He

For more detailed information, click the button below to download PDF.

  • Type: pressure gauge

For more detailed information, click the button below to download PDF.

  • End connection: 316L VAR, Electropolished
  • Bourdon Tube: 316L SS
  • Case: 304 SS
  • Lens: polycarbonate
  • Movement: stainess steel
  • Dial & Pointer: aluminum
  • Scale: pisg/bar dual scale
  • Dial Size: 2″
  • Accuracy: ±2%
  • Ambient temperature: -40℉ to 140℉ (-40℃ to 60℃)

For more detailed information, click the button below to download PDF.

HPS Vigour Pte Ltd Office

Raising the Bar for Quality and Performance

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