Ultra High Purity Gas Gauges (VRU)
- UHP “clean” for semiconductor gas applications, in accordance with SEMI/SEMATECH
- Packaged in two bags
- Purged with nitrogen
- Protective cap over threaded connection
- 100 % factory calibrated and helium leak tested to a maximum rate of 1 × 10-9 mbar I/s He
For more detailed information, click the button below to download PDF.
- Type: pressure gauge
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- End connection: 316L VAR, Electropolished
- Bourdon Tube: 316L SS
- Case: 304 SS
- Lens: polycarbonate
- Movement: stainess steel
- Dial & Pointer: aluminum
- Scale: pisg/bar dual scale
- Dial Size: 2″
- Accuracy: ±2%
- Ambient temperature: -40℉ to 140℉ (-40℃ to 60℃)
For more detailed information, click the button below to download PDF.