- Suitable for ultra pure, flammable or toxic fluid lines in semiconductor manufacturing equipment and facilities
- Direct diaphragm construction with superior sealing prerformance,remarkable durability,compactness and particle and dead-space-free performance
- Valve open and closed opsition is easily visible at a glance
- Excellent gas displacement characteristics
- EP treatment is standard for all wetted sufaces
- Standard seat material is PCTFE.Ployimede/PFA is option
For more detailed information, click the button below to download PDF.
- Max. Working Pressure: 150 psig (10 bar)
- Pneumatic Operating Pressure: 58~87psig (4-6bar)
- Max. Working Temp.: -10oF ~ 150oF (-23oC ~ 65oC)
- Surface finish: 10μin. Ra
For more detailed information, click the button below to download PDF.
- Body: see ordering info
- Diaphragm: Elgiloy®
- Seat packing: PCTFE
- Handle: AL
- Internal Leakage Allowance: 1×10-9 mbar I/s He
- External Leakage Allowance: 1×10-9 mbar I/s He
- Orifice: Ф4.4mm
- Weight: approx. 0.27kg (actuator not included)
For more detailed information, click the button below to download PDF.
