Ultra High Purity Gas regulators (VSR-100UC)
- Single-stage pressure regulator
- 15μin. Ra max, 10μin Ra average surface finish (10μin. Ra max, 7μin. Ra max. 5μin. Ra max optional)
- Minimized internal volume for short purge times
- All gas-wetted parts made of stainless steel SS 316L, Hastelloy C276 and PCTFE respectively
- Internal connectors for pressure gauges
- Flow capacity: to 30 slpm(standard), to 120 slpm(option)
- High control accuracy
- Metal-to-metal seal to atmosphere
- Simple outlet pressure limitation by hand-wheel
- 100% helium-leak-tested
- Cleaned for O2 service
For more detailed information, click the button below to download PDF.
- Type: single-stage
- Inlet pressure P1: max. 3500 psig
- Outlet pressure P2: 10/30/60/100/150 psig
- Surface finish:15μin.Ra max/10μin.Ra avg(10 μin.Ramax,7μin.Ra max,5μin.Ra max optional)
For more detailed information, click the button below to download PDF.
- Body: see ordering info
- Valve seat: PCTFE
- Diaphragm: Hastelloy® C276
- Inlets and Outlets: 1/4” / 3/8” face seal and tube weld
- Bonnet port: 1/8″NPT(on panel mount option,bonnet port is not threaded)
- Temperature range: -40°F to +160°F (-40°C to +71°C)
- Leak rate (to atmosphere): 1×10-9 mbar I/s He
- Leak rate (via seat): 1×10-8 mbar I/s He
- Flow capacity: Cv=0.09 (Cv=0.15 option)
- Weight: approx.1.35 kg (depending on connections and options )
- Supply pressure effect:0.35 psig rise in delivery pressure per 100 psig source pressure drop@Cv=0.09
0.5 psig rise in delivery pressure per 100 psig source pressure drop@Cv=0.15
For more detailed information, click the button below to download PDF.