- Single-stage pressure regulator
- 15μin. Ra max. 10μin Ra max optional
- design for bulk special gas suply system
- Tied diaphragm design with bellows sensny element
- All gas-wetted parts made of stainless steel SS 316L,Hastelloy C276 and PCTFE respectively
- Metal-to-metal seal to atmosphere
- 100% helium-leak-tested
For more detailed information, click the button below to download PDF.
- Type: single-stage
- Inlet pressure P1: max. 800 psig
- Outlet pressure P2: 30/60/100/150 psig
- Surface finish: 15μin. Ra max / 10μin. Ra max (optional)
For more detailed information, click the button below to download PDF.
- Body: SS 316L
- Valve seat: PCTFE (Vespel® optional)
- Diaphragm: Hastelloy® C276 / 316L
- Inlets and Outlets: 1/2” / 3/4” or 1” face seal or tube weld
- Bonnet port: 1/8” FNPT(option)
- Temperature range: -40oF to +160oF (-40oC to +71oC)
- Leak rate:(to atmosphere) 1×10-9 mbar I/s He
(via seat) 1×10-8 mbar I/s He - Flow capacity: Cv=4
- Weight: 6.7kg
For more detailed information, click the button below to download PDF.
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