Ultra High Purity Gas regulators (VSR-410UB)
- Single-stage pressure regulator
- 10μin. Ra surface finish (25μin. Ra optional)
- Minimized internal volume for short purge times
- All gas-wetted parts made of stainless steel SS 316L,Hastelloy C276 and PCTFE respectively
- Internal connectors for pressure gauges
- High inlet pressure type: Max. 3000 psig
- High control accuracy
- Metal-to-metal seal to atmosphere
- Simple outlet pressure limitation by hand-wheel
- 100% helium-leak-tested
- Tied-diaphragm design
- Sub-atmospheric pressure delivery option
For more detailed information, click the button below to download PDF.
- Type: single-stage
- Inlet pressure P1: max. 3000 psig
- Outlet pressure P2: -12.5~30/30/60/100/150 psig
- Surface finish: 10μin. Ra (25μin. Ra optional)
For more detailed information, click the button below to download PDF.
- Body: see ordering info
- Valve seat: PCTFE (Vespel® optional)
- Diaphragm: Hastelloy® C276
- Inlets and Outlets: 1/4” / 3/8” or 1/2” ace seal or tube weld
- Bonnet port: 1/8” NPT(F) (on panel mount option, bonnet port is not threaded)
- Temperature range: -40oF to +160oF (-40oC to +71oC)
- Leak rate:(to atmosphere)1×10-9 mbar I/s He
(via seat)1×10-8 mbar I/s He - Flow capacity: Cv=0.45
- Weight: approx. 2.0kg
- Supply pressure effect: 1.6 psig rise in delivery pressure per 100 psig source pressure drop
For more detailed information, click the button below to download PDF.