Ultra High Purity Gas regulators (VSR-410UB)

  • Single-stage pressure regulator
  • 10μin. Ra surface finish (25μin. Ra optional)
  • Minimized internal volume for short purge times
  • All gas-wetted parts made of stainless steel SS 316L,Hastelloy C276 and PCTFE respectively
  • Internal connectors for pressure gauges
  • High inlet pressure type: Max. 3000 psig
  • High control accuracy
  • Metal-to-metal seal to atmosphere
  • Simple outlet pressure limitation by hand-wheel
  • 100% helium-leak-tested
  • Tied-diaphragm design
  • Sub-atmospheric pressure delivery option

For more detailed information, click the button below to download PDF.

  • Type: single-stage
  • Inlet pressure P1: max. 3000 psig
  • Outlet pressure P2: -12.5~30/30/60/100/150 psig
  • Surface finish: 10μin. Ra (25μin. Ra optional)

For more detailed information, click the button below to download PDF.

  • Body: see ordering info
  • Valve seat: PCTFE (Vespel® optional)
  • Diaphragm: Hastelloy® C276
  • Inlets and Outlets: 1/4” / 3/8” or 1/2” ace seal or tube weld
  • Bonnet port: 1/8” NPT(F) (on panel mount option, bonnet port is not threaded)
  • Temperature range: -40oF to +160oF (-40oC to +71oC)
  • Leak rate:(to atmosphere)1×10-9 mbar I/s He
    (via seat)1×10-8 mbar I/s He
  • Flow capacity: Cv=0.45
  • Weight: approx. 2.0kg
  • Supply pressure effect: 1.6 psig rise in delivery pressure per 100 psig source pressure drop

For more detailed information, click the button below to download PDF.

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