Ultra High Purity Gas regulators (VSR-610UB)

  • Single-stage pressure regulator
  • 10μin. Ra surface finish (25μin. Ra optional)
  • Minimized internal volume for short purge times
  • All gas-wetted parts made of stainless steel SS 316L, Hastelloy C276 and PCTFE respectively
  • Internal connectors for pressure gauges
  • Flow capacity: to 100 slpm
  • High control accuracy
  • Metal-to-metal seal to atmosphere
  • Simple outlet pressure limitation by hand-wheel
  • 100% helium-leak-tested
  • Cleaned for O2 service

For more detailed information, click the button below to download PDF.

  • Type: single-stage
  • Inlet pressure P1: max. 3500 psig
  • Outlet pressure P2: 10/30/60/100 psig
  • Surface finish: 10μin.Ra (25μin.Ra optional)

For more detailed information, click the button below to download PDF.

  • Body: see ordering info
  • Valve: seat PCTFE
  • Diaphragm: Hastelloy®C276
  • Inlets and Outlets: 1/4” / 3/8” or 1/2″ face seal or tube weld
  • Bonnet port: 1/8″ NPT(on panel mount option,bonnet port is not threaded)
  • Temperature range: -40°F to +160°F (-40°C to +71°C)
  • Leak rate (to atmosphere): 1×10-9 mbar I/s He
  • Leak rate (via seat): 1×10-8 mbar I/s He
  • Flow capacity Cv=0.13
  • Weight approx.1.54 kg (depending on connections and options )
  • Supply pressure effect:0.25 psig rise in delivery pressure per 100 psig source pressure drop

For more detailed information, click the button below to download PDF.

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