Ultra High Purity Gas regulators (VSR-610UB)
- Single-stage pressure regulator
- 10μin. Ra surface finish (25μin. Ra optional)
- Minimized internal volume for short purge times
- All gas-wetted parts made of stainless steel SS 316L, Hastelloy C276 and PCTFE respectively
- Internal connectors for pressure gauges
- Flow capacity: to 100 slpm
- High control accuracy
- Metal-to-metal seal to atmosphere
- Simple outlet pressure limitation by hand-wheel
- 100% helium-leak-tested
- Cleaned for O2 service
For more detailed information, click the button below to download PDF.
- Type: single-stage
- Inlet pressure P1: max. 3500 psig
- Outlet pressure P2: 10/30/60/100 psig
- Surface finish: 10μin.Ra (25μin.Ra optional)
For more detailed information, click the button below to download PDF.
- Body: see ordering info
- Valve: seat PCTFE
- Diaphragm: Hastelloy®C276
- Inlets and Outlets: 1/4” / 3/8” or 1/2″ face seal or tube weld
- Bonnet port: 1/8″ NPT(on panel mount option,bonnet port is not threaded)
- Temperature range: -40°F to +160°F (-40°C to +71°C)
- Leak rate (to atmosphere): 1×10-9 mbar I/s He
- Leak rate (via seat): 1×10-8 mbar I/s He
- Flow capacity Cv=0.13
- Weight approx.1.54 kg (depending on connections and options )
- Supply pressure effect:0.25 psig rise in delivery pressure per 100 psig source pressure drop
For more detailed information, click the button below to download PDF.